NanoX-8000 3D Profilometer
Specifications
Device Size
509mm (W)×610mm (L)×0.05mm (H) ~550mm (W)×650mm (L)×1.2mm (H)
Measuring Mode
Automatic, semi-automatic, manual
Measured Item
Trace, Via, SRO, Land(pad), Dimple, Presolder, SR Flat, Eccntricity, SR Prefile data processing, SR Surface Area
Power
Metallographical objective: 5X, 10X, 20X; interference objective: 20X and 50X
Range
Roughness≥0.25μm, stair height 3μm-75μm, CD dimension 5μm-2000μm
GR&R
Repeatability≤20%; reproducibility≤30%
Code Reading
Automatic Code Reading
Measuring Efficiency
3D measuring≥40s/point; 2D measuring: 2s/point
MTTR
≤3h
MTBF
≥1500h
