Defect Inspection Equipment
CFocus Wafer Inspection System
A piece of appearance defect inspection equipment
It is a piece of appearance defect inspection equipment. It is applicable to appearance inspection of devices including EWLB/CMOS/MEMS/LED/LENS/GLASS WAFER/GAS WAFER/COG, and more.
CFocus Wafer Inspection System
Specifications
IC Packaging
EWLB/CMOS/MEMS/LED/LENS/GLASS WAFER/GAS WAFER/COG
Loader
Bare wafer or frame wafer
Silicon Wafer Size
4 in/6 in/8 in or 6 in/8 in/12 in
Multi-lens (Front 2D)
2.5X/3.5X/5X/7.5X (optional 20X)
Lights
Light and dark fields of independent lights
Resolution
3.14um/1.57um/0.78um per pixel
Inspection Capability
2×2 pixel
3D Camera
Optional
Review Lens (Color)
Yes
Transferring Manipulator
Precise dual-arm module
OCR/QR Code
Yes
Warpage Range
2mm
Inspected Item
Wafer scratch inspection/chipping/peeling/crack/dirt/RDL open circuit/bump size and height/ residual glue/ metal residue, and more.
UPH
8 inch, 2D inspection, 2.5X, ≥90 wafers | 8 inch, 3D inspection, ≥40 wafers
MTBA
6h
MTBF
1,000h
Cleanliness Class
Class 100
Inner Cleanliness
Yes
Equipment Dimension
2.3m×1.8m×2m